Zero displacement microelectromechanical force sensor using feedback control

Title: Zero displacement microelectromechanical force sensor using feedback control
Creator: Coskun, M. Bulut; Moore, Steven; Moheimani, S. O. Reza; Neild, Adrian; Alan, Tuncay
Relation: Applied Physics Letters Vol. 104, Issue 15
Publisher Link: http://dx.doi.org/10.1063/1.4871380
Publisher: American Institute of Physics
Resource Type: journal article
Date: 2014
Description: Conventional microscale force sensors use moving parts to infer applied forces. Whenever physical deformations are involved, the sensor characteristics become a function of mechanical parameters, and there is an inevitable trade-off between the sensitivity and measurement range. We developed a microfabricated force sensor that uses feedback control to nullify any displacements within the device, directly transducing forces as high as 1.5 mN with a 7.8 nN resolution. The range and sensitivity of the device no longer depend on mechanical parameters, which allow the same device to be used to test samples with a wide range of stiffnesses without loss of accuracy.
Subject: microelectromechanical systems; biosensors; atomic force microscopy; electrostatics; error analysis
Identifier: http://hdl.handle.net/1959.13/1067073
Identifier: uon:18303
Identifier: ISSN:0003-6951
Language: eng
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